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portada Atomic Layer Deposition for Semiconductors
Type
Physical Book
Publisher
Language
English
Pages
263
Format
Hardcover
Dimensions
23.8x16.3x2 cm
Weight
0.52 kg.
ISBN13
9781461480532

Atomic Layer Deposition for Semiconductors

Hwang, Cheol Seong (Author) · Springer · Hardcover

Atomic Layer Deposition for Semiconductors - Hwang, Cheol Seong

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Synopsis "Atomic Layer Deposition for Semiconductors"

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

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All books in our catalog are Original.
The book is written in English.
The binding of this edition is Hardcover.

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