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portada Lithography
Type
Physical Book
Publisher
Author
Language
English
Pages
680
Format
Hardcover
Dimensions
24.4x17x3.7 cm
Weight
1.27 kg.
ISBN13
9789533070643
Categories

Lithography

Wang, Michael (Author) · Intechopen · Hardcover

Lithography - Wang, Michael

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Synopsis "Lithography"

Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.

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The book is written in English.

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The binding of this edition is Hardcover.

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