Name: Nanofabrication. Principles, Capabilities and Limits
SKU: 64791247
Price: 3431.00 TWD
Availability: InStock
Author: Zheng Cui
ISBN: 9783031625480

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portada Nanofabrication. Principles, Capabilities and Limits

Nanofabrication. Principles, Capabilities and Limits

Type

Physical Book

Publisher

Springer International Publishing AG

Author

Zheng Cui

Year

2025

Pages

413

Format

Paperback

Dimensions

23.5x15.5 cm

ISBN13

9783031625480

Nanofabrication. Principles, Capabilities and Limits

Zheng Cui (Author) · Springer International Publishing AG · Paperback

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Synopsis "Nanofabrication. Principles, Capabilities and Limits"

Nanofabrication: Principles, Capabilities, and Limits provides a practical guide to nanofabrication technologies and processes. It was first published in 2008 and is now in an updated third edition. The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition. There is also a chapter describing various tricks that enable the fabrication of nanostructures that would otherwise be impossible using traditional methods. The unique feature of this book is that each technique introduced is not only about its capabilities but also its limits so that the readers are fully aware of the best options to choose from a toolbox of nanofabrication processes covered in the book.