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portada Silicon Carbide Microelectromechanical Systems for Harsh Environments
Type
Physical Book
Author
Publisher
Year
2006
Language
English
Pages
192
Format
Hardcover
Dimensions
23x16x2 cm
Weight
0.49 kg.
ISBN
1860946240
ISBN13
9781860946240
Categories

Silicon Carbide Microelectromechanical Systems for Harsh Environments

Rebecca Cheung (Author) · Imperial College Press · Hardcover

Silicon Carbide Microelectromechanical Systems for Harsh Environments - Cheung, Rebecca

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Synopsis "Silicon Carbide Microelectromechanical Systems for Harsh Environments"

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

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The binding of this edition is Hardcover.

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