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portada Atomic Layer Deposition for Semiconductors
Type
Physical Book
Publisher
Year
2016
Language
English
Pages
276
Format
Paperback
ISBN13
9781489979438
Categories

Atomic Layer Deposition for Semiconductors

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Synopsis "Atomic Layer Deposition for Semiconductors "

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

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The book is written in English.

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The binding of this edition is Paperback.

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