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portada Materials and Processes for Submicron Technologies: Volume 89
Type
Physical Book
Publisher
Author
Year
1999
Language
English
Pages
1002
Format
Hardcover
ISBN
008043617x
ISBN13
9780080436173
Categories

Materials and Processes for Submicron Technologies: Volume 89

Martinez-Duart, J. M. ; Madar, R. ; Levy, R. A. (Author) · Elsevier Science · Hardcover

Materials and Processes for Submicron Technologies: Volume 89 - Martinez-Duart, J. M. ; Madar, R. ; Levy, R. a.

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Synopsis "Materials and Processes for Submicron Technologies: Volume 89"

The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).

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