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portada wafer bonding: applications and technology
Type
Physical Book
Publisher
Year
2004
Language
English
Pages
504
Format
Hardcover
Dimensions
23.4x15.5x3.3 cm
Weight
0.84 kg.
ISBN
3540210490
ISBN13
9783540210498

wafer bonding: applications and technology

Marin Alexe (Illustrated by) · Ulrich Gösele (Illustrated by) · Springer · Hardcover

wafer bonding: applications and technology - Alexe, Marin ; Gösele, Ulrich

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Synopsis "wafer bonding: applications and technology"

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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