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portada an introduction to surface-micromachining
an introduction to surface-micromachiningan introduction to surface-micromachining
Type
Physical Book
Publisher
Language
English
Pages
189
ISBN
1402080204
ISBN13
9781402080203

an introduction to surface-micromachining

Johnstone,Parmaswaran (Author) · Springer · Physical Book

an introduction to surface-micromachining - johnstone,parmaswaran

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Synopsis "an introduction to surface-micromachining"

an introduction to surface-micromachining provides for the first time a unified view of surface-micromachining. building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. an introduction to surface-micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. this book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

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