Name: dielectric films for advanced microelectronics
SKU: 10759416
Price: 9358.00 TWD
Availability: InStock
Author: mikhail baklanov, karen maex, martin green

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portada dielectric films for advanced microelectronics

dielectric films for advanced microelectronics

Type

Physical Book

Publisher

wiley

Author

mikhail baklanov, karen maex, martin green

Pages

508.00

ISBN

0470013605

ISBN13

9780470013601

Synopsis "dielectric films for advanced microelectronics"

this book presents an in-depth overview of the novel developments, made by the scientific leaders in the are of modern dielectric films for advanced microelectronic applications. this book contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. it covers a broad range of related topics from physical principles to design, fabrication, characterization, and applications of novel dielectric films.