Name: doping engineering for front-end processing: volume 1070
SKU: 25419986
Price: 4126.00 TWD
Availability: InStock
Author: Pawlak, B. J. ; Pelaz, M. L. ; Law, M.
ISBN: 9781605110400

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portada doping engineering for front-end processing: volume 1070

doping engineering for front-end processing: volume 1070

Type

Physical Book

Illustrated by

B. J. Pawlak

M. L. Pelaz

M. Law

Publisher

Cambridge University Press

Author

Pawlak, B. J. ; Pelaz, M. L. ; Law, M.

Year

2008

Language

English

Pages

319

Format

Hardcover

Dimensions

23.4x16x2.3 cm

Weight

0.57 kg.

ISBN

160511040x

ISBN13

9781605110400

Synopsis "doping engineering for front-end processing: volume 1070"

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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doping engineering for front-end processing: volume 1070 - Pawlak, B. J. ; Pelaz, M. L. ; Law, M.

Synopsis "doping engineering for front-end processing: volume 1070"

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